Compatible with up to ø100-mm (circular) and □70-mm (rectangular) substrates
Features:
- ・Desktop size
- ・Low price but high performance, suitable for experimentation
- ・Safety cover with interlock sensor
- ・Programmable up to10 steps and 100 patters
- ・Suitable for development evaluation using various chemicals
Application
Semiconductor, solar battery, mobile device, optical lens, glass lens, bio nanotechnology, housing material, cutting-edge medical device, LCD, and other manufacturing and experiment for coding and producing thin film
Customers
Small-size laboratories, major companies, universities, public offices
Brochure
Download brochure from the below link.
Trial Use and Sample Test
Requests for offering trial model and conducting sample test are acceptable for free. Contact us for details.
Specification
Substrate size
Φ5 - Φ100 mm
(Maximum: 4 inches in diameter, 70 mm in square)
(Maximum: 4 inches in diameter, 70 mm in square)
Work (substrate) weight
Up to 200g (contact us for details)
Cup inner diameter
220mm
Overall size
W250, D330, H 272 mm (cover closed) / 500 mm (cover opened)
Power supply
1Φ 100V-10A (AC servomotor 200W) 50 / 60Hz
Substrate adsorption pressure
0-7000rpm/±1rpm (under load)
Substrate adsorption pressure
-70 - -80kPa
Vacuum pump displacement: over 12L/min
● 6mm tube can be attached in one touch
● 6mm tube can be attached in one touch
No. of programmable
steps and patterns
steps and patterns
10 steps / 100 patterns (default)
20 steps / 50 patterns (optional)
50 steps / 20 pattern (optional)
20 steps / 50 patterns (optional)
50 steps / 20 pattern (optional)
Display
LCD, 4 lines (20 letters per line)
Recipe no., rpm, time, and adsorption pressure are available.
Recipe no., rpm, time, and adsorption pressure are available.
Control
Microprogram control
Numeric keypad is used for programming.
Numeric keypad is used for programming.
Material of outer cover and cup
SUS304, electropolished
Teflon coating available as an option.
Teflon coating available as an option.
Material of safety cover
Transparent PVC
● Instillation hole is covered with a sliding cover.
● Instillation hole is covered with a sliding cover.
Safety measure
Interlocking function with safety cover and magnet sensor
● Recipe won’t start while cover is open.
● Rotation automatically halts when cover is opened.
Interlocking by substrate adsorption pressure
● No rotation during non-adsorption
● Recipe won’t start while cover is open.
● Rotation automatically halts when cover is opened.
Interlocking by substrate adsorption pressure
● No rotation during non-adsorption
Weight
18kg
Delivery
Contact us.
Price list
Unit
Main unit
JPY 700,000
Packing and delivery cost (in Japan)
JPY 10,000
Option
Start production based on substrate size
Available material: POM, PCTFE, PTFE, PEEK, aluminum*
* Teflon coating available
Available material: POM, PCTFE, PTFE, PEEK, aluminum*
* Teflon coating available
JPY 65,000 –
Contact us for estimation
Contact us for estimation
Vacuum pump for
substrate suction
substrate suction
● Compact diaphragm dry vacuum pump 12S (connecting port can be modified)
● Exhaust velocity: 12 L/min /14 L/min (50/60Hz)
Transparent urethan vacuum tube: Φ6×3m
● Exhaust velocity: 12 L/min /14 L/min (50/60Hz)
Transparent urethan vacuum tube: Φ6×3m
JPY 45,000
Positive/negative rotation
Option for positive and negative rotation function
JPY 100,000
Q&A
Please bear the shipping costs when returning the sample machine.
Use of our sample stage is free of charge. However, please pay for the cost of a newly produced sample stage.