Customize Spin Coater to Fit Your Purpose

Active's ACT Series Spin Coater is available in 7 standard sizes and can be customized with optional specifications to meet various needs. For example, the standard program memory, which contains the 10-step/100-pattern multi-step recipes, can be changed to 20-step/50-pattern or 50-step/20-pattern. It can also be customized for development and evaluation using a variety of chemical solutions.
Spin coating is essential for applying resists to wafers in semiconductor manufacturing. However, some tasks cannot be accomplished with standard equipment alone. Please contact us if you need automatic dripping, edge flushing, backflushing, explosion protection, electrical box separation, and compatibility with automatic robotic transfer.
Advantages of Customized Model
Our customized model is manufactured by combining the various units to suit your purpose and requirements. We have manufactured many customized spin coaters ranging from compact, simple spin coaters to large spin coaters for large substrates.
Customized spin coaters can be tailored to your specific needs, making them easy to use and efficient for your application.
Why Our Customized Spin Coaters Are Selected
We have received various requests from customers to add features such as automatic chemical dripping, solution leakage prevention, edge rinsing, and back rinsing. These features are rarely implemented in conventional spin coaters. However, we can fulfill these requests and also provide the process know-how.
We can also dock our standard spin coater to your automatic transfer robot, which transfers substrates to the designated locations. We can also combine core units according to customer specifications. As a long-time supplier of spin coating technology, we can offer advice and expertise. Please do not hesitate to contact us if you have any questions.

Movie of Special Task

Examples of Customization

S-1: Automatic dripping unit mounted
  • Instant spin-coating
  • High-precious spin-coating for rectangular substrate
  • Automatic dripping unit
  • Air release from cup's circuit
● Spin coater with automatic swing arm, micro syringe pump and precisive dripping feature
Substrate size
φ5-100 inch (Max. φ 6 inch, □110mm)
AC100V Max.5000 rpm
SIZE
620w×560d×900h (ACT-300AⅡS)
Delivery after order
Please contact us
S-2: Single substrate rinser dryer
S-2: Single substrate rinser dryer
  • HEPA chamber unit
  • Pure water dripping unit
● Dripping unit with automatic swing arm
● Rinse substrate with super pure water and then dry it with nitrogen blow
Substrate size
φ4 inch
AC100V Max.5000rpm
Dimension
650W×550D×690H (ACT-300AⅡDry)
Delivery after order
Please contact us
S-3: Spin rinser with pure water and dryer with nitrogen blow
S-3: Spin rinser with pure water and dryer with nitrogen blow
  • Automatic dripping unit
  • Centering jig
  • Air release from cup's circuit
● Dripping unit with automatic swing arm (instill 50 cc solution with a syringe) ● Conduct edge rinsing and back rinsing powered by the pressurized tank)
Substrate size
φ2-6 inch
AC100V Max.5000rpm
Dimension
740W×775D×715H (ACT-300AⅡS)
Delivery after order
Please contact us
S-4: With automatic dripping unit
S-4: With automatic dripping unit
  • Automatic dripping unit
  • HEPA chamber unit
Dripping unit with automatic swing arm
Pressurized tank provides chemical solution
Substrate size
φ5-10 inch (glass)
AC100V Max.3000rpm
Dimension
500W×670D×890H (ACT-400AⅡS)
Delivery after order
Please contact us
S-5: With edge rinsing unit
S-5: With edge rinsing unit
  • Edge rinsing unit
  • Automatic dripping unit
  • Back rinsing
● Dripping unit with automatic swing arm (instill solution powered by the pressurized tank)
● Conduct edge rinsing and back rinsing powered by the pressurized tank)
Substrate size
Max. φ200 mm
Three-phase AC 100V Max.3000 rpm
Dimension
970W×650D×520H (ACT-500AⅡS)
Delivery after order
Please contact us
S-6: With the attached manual dripping unit
S-6: With the attached manual dripping unit
  • Manual dripping unit
● Dripping unit with manual swing arm
● Suitable for experience as the required amount of solution (up to 50 cc) can be instilled from the syringe
Substrate size
Max. φ150 mm
AC100V Max.6000rpm
Dimension
470W×460D×470H (ACT-300AⅡS)
Delivery after order
Please contact us
S-7: Using UV curable resin as spin-coat solution
S-7: Using UV curable resin as spin-coat solution
  • UV-curable resin coating
● The cup is coated by UV-curable resin with the top-mounted UV ramp.
● The quartz plate is mounted at the cover top.
Substrate size
Max. φ8 inch and □150 mm
AC100V Max.5000rpm
Dimension
530W×640D×550H (ACT-400AS)
Delivery after order
Please contact us
S-8: With the expansion machine for automatic dripping unit
S-8: With the UV-curable resin-coated cup
  • UV-curable resin coating
● An automatic dripping unit with a swing arm is added to ACT-300 AII.
Substrate size
Max. φ150mm
AC100V Max.5000rpm
Dimension
Spin coater: W 350 mm × D 450 mm × H 335 mm(ACT-300 AII S)
Expansion part: W 180 mm × D 450 mm × H 500 mm(ACT-300 AII S)
Delivery after order
Please contact us
S-9: With the manual dripping and edge rinsing units
S-9: With the manual dripping and edge rinsing units
  • Manual dripping unit
  • Back rinsing
● Dripping unit with manual swing arm (instill solution powered by the pressurized tank)
● Conduct edge rinsing and back rinsing powered by the pressurized tank)
● A manual-swing-style back rinsing nozzle is attached.
Substrate size
Max. φ150 mm
AC100V Max.5000rpm
Dimension
745W×575D×765H (ACT-300AⅡS)
Delivery after order
Please contact us
S-10: With the attached dryer controller
S-10: With the attached dryer controller
  • Automatic dripping unit
  • Blow-by-hot air dryer
● Dripping unit with automatic swing arm (Left: pressurized tank and nozzle for blow drying. Right: pressurized tank)
● Blow-by-hot air drying
● Compatible with external output interface
Substrate size
φ3 inch wafer
AC100V Max.6000rpm
Dimension
995W×600D×460H (ACT-300AⅡS)
Delivery after order
Please contact us
S-11: With UV lamp unit
S-11: With UV lamp unit
  • UV lamp unit
● Compatible with UV-curable resin
● The UV lamp unit is equipped with a manual up-and-down mechanism and manual shutter
Substrate size
Max. □ 110 × 110 × 2t mm (glass)
Three-phase AC 200V Max.9985 rpm
Dimension
890W×675D×690H (ACT-300AⅡS)
Delivery after order
Please contact us
S-12: For producing organic EL panel substrates
S-12: For producing organic EL panel substrates
  • Automatic dripping unit
● Automatic dripping unit with a swing arm
● Four 50cc SUS syringes
Substrate size
Max. φ150 mm and □110 mm (wafer and glass)
AC100V Max.6000rpm
Dimension
580W×575D×580H (ACT-300AⅡS)
Delivery after order
Please contact us
S-13: With automatic opening and closing cover and the attached simple seal-up cup
S-13: With automatic opening and closing cover and the attached simple seal-up cup
  • Automatic opening and closing cover
  • simple seal-up cup
  • Electronic pump for dripping
● Two automatic dripping units with a swing arm (chemical solution, air blow)
Substrate size
□ 5 inch × 0.3-2.5 mm (glass)
AC 100V Max. 5000 rpm
Dimension
600W×750D×700H (ACT-400AⅡS)
Delivery after order
Please contact us
S-14: Electrical box separation model with the attached FIR heater
S-14: Electrical box separation model with the attached FIR heater
  • Electrical box separation
  • FIR heater
Feature
● Hatch-type cover mounts FIR heater to heat substrates.
● Prevention of scald by touching the heated cover is implemented.
Substrate size
Max. φ6 inch wafer and □110 mm × 2 mm glass substrate
Three-phase AC 200V Max. 8000 rpm
Dimension
● Spin coater: W 365 mm × D 350 mm × H 405 mm
● Electrical box: W 480 mm × D 480 mm × H 275 mm(ACT-300D II S)
Delivery after order
Please contact us
S-15: With the attached syringe pump
S-15: With the attached syringe pump
  • Automatic dripping unit
  • Syringe pump
Feature
● The syringe pump adjusts the instillation amount of chemical solution.
Substrate size
Max. □110 mm (glass)
AC100V Max.6000rpm
Dimension
500W×600D×730H (ACT-300AⅡS)
Delivery after order
Please contact us
S-16 For producing glass lenses (floor-standing model)
S-16 For producing glass lenses (floor-standing model)
  • Electronic slider
  • Laser sensor
  • Touch panel
● Two electronic sliders are mounted on each side.
● The left slider applies primer and photochromic solution to the lenses.
● The right slider expands the applied solutions over the entire lenses.
● The edge of lenses is scraped.
● The laser sensor measures the lenses' center height.
Substrate size
φ60-90 mm (glass lenses)
AC100V Max.6000rpm
Dimension
900W×1045D×2000H (ACT-300AⅡS)
Delivery after order
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S-17 Spray instillation type with the attached FIR heater (floor-standing model)
S-17 Spray instillation type with the attached FIR heater (floor-standing model)
  • utomatic dripping unit
  • Spray instillation type unit
  • FIR heater
Feature
● Two dripping units are mounted: spray type on the left side and 50-cc syringe type on the Right.
● This customized model forms the film by dripping the solution, spin-coating the substrate and applying heat treatment.
Feature
● Two dripping units are mounted: spray type on the left side and 50-cc syringe type on the Right.
● This customized model forms the film by dripping the solution, spin-coating the substrate and applying heat treatment.
Substrate size
Max. φ6 inch wafer
● Spin coater: AC 100V Max. 5000 rpm
● FIR heater: single-phase AC 200V
Dimension
750W×845D×1650H (ACT-300AⅡS)
Delivery after order
Please contact us
S-18 Cup rotating type
S-18 Cup rotating type
  • Up-down mechanism dual cover
  • Removable drainage cup
Feature
● Compatible with mid-size substrates
Substrate size
□300×400 mm (glass)
Three-phase AC 200V Max. 2000 rpm
Dimension
1400W×1300D×1500H (ACT-900AⅡ)
Delivery after order
Please contact us
S-19 Cup rotating type with manually-settable cover
S-19 Cup rotating type with manually-settable cover
  • 22kw motor
  • Simple jig for substrate setting
Feature
● Compatible with large-size substrates
Substrate size
□1000×1000×20 mm (30kg substrate)
Three-phase AC 200V Max. 1000 rpm
Dimension
2000W×2000D×1200H (ACT-1800AⅡS)
Delivery after order
Please contact us
S-20 With draft chamber
S-20 With draft chamber
  • Multiple drainage and air release mechanisms
  • Explosion protection
Feature
● Two mechanisms of drainage and air release are mounted.
● These mechanisms can be switched automatically.
Substrate size
□400×239×0.5 mm (glass)
Three-phase AC 200V Max. 2000 rpm
Dimension
1250W×1250D×2000H (ACT-900AS)
Delivery after order
Please contact us