Compatible with up to ø500-mm (circular) and □360-mm (rectangular) substrates
Feature:
- ・High-performance and affordable
- ・Freestanding type with casters for easy mobility
- ・Safety cover with interlock sensor
- ・Multi-stage processing available up to 10 steps and 100 patters
- ・Emergency stop button
- ・Suitable for development evaluation using various chemicals
- ・Compatible with autonomous delivery robot (customized)
Application
Semiconductor, solar battery, mobile device, optical lens, glass lens, bio nanotechnology, housing material, cutting-edge medical device, LCD, and other manufacturing and experiment for coding and producing thin film
Customer
Small-size laboratories, major companies, universities and public offices
Trial Use and Sample Test
We offer a sample model of 220, 300 and 400 series for trial use and accept the request of sample test using these series. Please contact us from below for details.
Specification
Substrate size
Φ5～Φ500mm（Max.Φ20 inches, □360mm）
Work (substrate) weight
Contact us
Cup inner dimension
Φ700mm
Overall size (mm)
W 848 (983 including damper) × D962 ×H996 (cover close) / 1650 (cover open)
● Size may vary according to installation site’s height limit and other conditions.
● Size may vary according to installation site’s height limit and other conditions.
Power supply
Power supply and output power of servomotor depend on substrate side and weight.
Spin speed and accuracy
0-3000rpm/±2rpm（under load）
Substrate adsorption pressure
-70 ～ -80kPa
Vacuum pump displacement: over 40L/min
(6mm tube can be attached in one touch)
(6mm tube can be attached in one touch)
No. of programmable steps and patterns
Display
LCD, 4 lines (20 letters per line)
Receipt no., Rotation, Time, Adsorption pressure
Receipt no., Rotation, Time, Adsorption pressure
Control
Microprogram control (programmable with numeric keypad)
Material of outer cover and cup
SUS304, electropolished
Teflon coating available as an option
Material of safety cover
Transparent PVC
Instillation hole is covered with a sliding cover.
Safety measure
Interlocking function with safety cover and magnet sensor
● Recipe won’t start when cover is open.
● Automatic rotation halts when cover is opened.
Interlocking by substrate adsorption pressure
● No rotation during non-adsorption
● Recipe won’t start when cover is open.
● Automatic rotation halts when cover is opened.
Interlocking by substrate adsorption pressure
● No rotation during non-adsorption
Weight
About 350 kg
*Weight may vary according to specification.
*Weight may vary according to specification.
Delivery
Contact us
Price list
Unit
Main Unit
Contact Us
Packing and delivery cost (in Japan)
Contact Us
Option
Based on substrate size
Available material: POM, PCTFE, PTFE, PEEK, aluminum*
* Teflon coating available
Available material: POM, PCTFE, PTFE, PEEK, aluminum*
* Teflon coating available
JPY 65,000 –
Contact us for estimation
Contact us for estimation
Vacuum pump
for substrate suction
for substrate suction
● Compact diaphragm dry vacuum pump 12S (connecting port can be modified)
● Exhaust velocity: 12 L/min /14 L/min (50/60Hz)
● Transparent urethan vacuum tube: Φ6×3m
● Exhaust velocity: 12 L/min /14 L/min (50/60Hz)
● Transparent urethan vacuum tube: Φ6×3m
JPY 85,000
Based on substrate size and sample table’s shape （made by POM and SUS304）
JPY 70,000 –
Contact us for estimation
Contact us for estimation
Q&A
