Various programs and settings in a simple display
Easy to program and check test conditions
Our spin coater's operation display shows real-time rpm and vacuum pressure. A variety of programs can be easily entered through the simple display.
The character display LCD module used in standard models can display up to 80 characters (20 characters x 4 lines). Depending on the specifications, the Customized models can display up to 160 characters (40 characters x 4 lines).
The character display LCD module used in standard models can display up to 80 characters (20 characters x 4 lines). Depending on the specifications, the Customized models can display up to 160 characters (40 characters x 4 lines).
How to Operate Standard Model
Menu
1: EXCUTE - Start operation
2: EDIT - Input, delete or copy recipes
3: TEST - Start test operation
4: POSITION - Set stop position
● When “3: TEST" is disabled in the manufacturer's setting mode, “3: POSITION” is displayed instead.
● Pressing the numeric keypad can skip “ENT” input.
2: EDIT - Input, delete or copy recipes
3: TEST - Start test operation
4: POSITION - Set stop position
● When “3: TEST" is disabled in the manufacturer's setting mode, “3: POSITION” is displayed instead.
● Pressing the numeric keypad can skip “ENT” input.
Recipe Selection
1. Blink the recipe number.
2. Use numeric keypad to enter the double-digit recipe number
3. Display recipe contents
4. Use ↑ or ↓ keys to scroll through the recipe steps.
5. Change “NO” into “ST” to display the step number in the recipe.
6. Press "ESC" to return to the menu.
7. Press "ENT" to enter the pre-operating state.
2. Use numeric keypad to enter the double-digit recipe number
3. Display recipe contents
4. Use ↑ or ↓ keys to scroll through the recipe steps.
5. Change “NO” into “ST” to display the step number in the recipe.
6. Press "ESC" to return to the menu.
7. Press "ENT" to enter the pre-operating state.
Pre-operation
1. Make sure that EMG switch is off and the vacuum switch is on, and then press "START" to start the operation.
2. Press "ESC" to return to the recipe selection.
3. Vacuum pressure is displayed in the upper right corner.
2. Press "ESC" to return to the recipe selection.
3. Vacuum pressure is displayed in the upper right corner.
During Operation
● "V=56" represents the pressure value (-56kPa).
● “SP" in the fourth line represents the present rpm.
● "SL" and "TM" represent the operating time.
● "SLsec" represents acceleration/deceleration time.
● "TMsec" represents the hold time after the command rpm is reached.
● During operation, "VACUUM" is electrically ignored to maintain substrate suction.
● The emergency stop is performed when the pressure value falls below -50kPa or the safety cover is opened.
● When "STOP" is pressed, the operation immediately stops and recipe selection is shown.
● "START" switch LED lights blink during operation.
● “SP" in the fourth line represents the present rpm.
● "SL" and "TM" represent the operating time.
● "SLsec" represents acceleration/deceleration time.
● "TMsec" represents the hold time after the command rpm is reached.
● During operation, "VACUUM" is electrically ignored to maintain substrate suction.
● The emergency stop is performed when the pressure value falls below -50kPa or the safety cover is opened.
● When "STOP" is pressed, the operation immediately stops and recipe selection is shown.
● "START" switch LED lights blink during operation.
End of Operation
● “END” is displayed a few seconds after the end of the operation.
● Operation display goes back to the pre-operation state
● Operation display goes back to the pre-operation state
Emergency Stop (1)
● The emergency stop is performed when the cover is opened.
● Push “STOP” to go back to the menu.
● Push “STOP” to go back to the menu.
Emergency Stop (2)
● The emergency stop is performed when the vacuum value falls below the set value.
● When “STOP” is pushed while EMG switch is off, the display goes back to the menu.
● When EMG switch is on, an alarm sounds.
● When “STOP” is pushed while EMG switch is off, the display goes back to the menu.
● When EMG switch is on, an alarm sounds.
How to Set Stop Position
1. Set the angle in “POSITION.”
2. Set whether the stop position should be enabled in "ACTION."
ON (key “1”): Enabled
OFF (key “0”): Disabled
3. Press "ENT" to start rotation, and the substrate is set to the specified position.
2. Set whether the stop position should be enabled in "ACTION."
ON (key “1”): Enabled
OFF (key “0”): Disabled
3. Press "ENT" to start rotation, and the substrate is set to the specified position.
How to Set Recipe at Menu
Menu
1: SET: Enter or modify recipe
2: COPY: Copy recipe
3: ERASE: Delete recipe
● To access each setting, choose 1, 2 or 3.
● Press ESC to return to the menu.
2: COPY: Copy recipe
3: ERASE: Delete recipe
● To access each setting, choose 1, 2 or 3.
● Press ESC to return to the menu.
How to Set Recipe
1. Blink the recipe number.
2. Specify the recipe number in double digits to display recipe contents.
3. Use ↑ or ↓ keys to scroll through the recipe step.
4. Press "ENT" to move the cursor to step 1.
2. Specify the recipe number in double digits to display recipe contents.
3. Use ↑ or ↓ keys to scroll through the recipe step.
4. Press "ENT" to move the cursor to step 1.
5. Use arrow keys to move to the item to change.
6. Blink the letter to modify the value.
7. Press "ENT" to go back to the recipe selection.
6. Blink the letter to modify the value.
7. Press "ENT" to go back to the recipe selection.
How to Operate Customized Model
Menu
1: EXCUTE - Start operation
2: EDIT - Input, delete or copy recipes
3: TEST - Start test operation
4: POSITION - Set stop position
● To access each setting, choose 1, 2 or 3.
5: DISPENSE - Check dispenser operation
2: EDIT - Input, delete or copy recipes
3: TEST - Start test operation
4: POSITION - Set stop position
● To access each setting, choose 1, 2 or 3.
5: DISPENSE - Check dispenser operation
Operation
How to Check Dispense Operation
1. Use arrow keys to move the cursor.
2. Set dispenser position
⮚ Select “HM” and push “ENT” to move the arm to the original position.
⮚ Specify the number to set the arm position and push “ENT” to move the arm to the specified position.
3. Set the arm’s moving speed at [SPD] and push “ENT” to move the arm at the specified speed.
4. Perform the instillation at the set time by “DIS” selection.
5. Use ↑ or ↓ keys to move the arm.
6. Press "ENT" to go back to the previous screen. When the arm is not in the original position, move the arm is returned there and then the display shows the previous screen.
2. Set dispenser position
⮚ Select “HM” and push “ENT” to move the arm to the original position.
⮚ Specify the number to set the arm position and push “ENT” to move the arm to the specified position.
3. Set the arm’s moving speed at [SPD] and push “ENT” to move the arm at the specified speed.
4. Perform the instillation at the set time by “DIS” selection.
5. Use ↑ or ↓ keys to move the arm.
6. Press "ENT" to go back to the previous screen. When the arm is not in the original position, move the arm is returned there and then the display shows the previous screen.
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