Sample Stage
Essential part for spin-coating
The stage is an essential part of the spin coater.
The appropriate sample stage depends on the conditions of the substrate to be spin-coated, such as thickness, size, shape (circular or rectangular) and material, and whether vacuum suction is required. Therefore, we make proposals for each customer. Sample stage materials are available in POM, PTFE, PCTFE, PEEK, and alumite-coated aluminum. Aluminum can also be Teflon coated.
If you have multiple substrates to be spin-coated by fixing them with vacuum suction, it is ideal to prepare one sample stage per substrate.
A substrate smaller than the vacuum suction area of the stage cannot be placed. The substrate cannot cover the holes and grooves for the vacuum suction, resulting in chemical solution leaking into the vacuum path and causing the equipment to fail.
Conversely, a larger substrate can be placed on the stage. However, if the substrate is too large compared to the vacuum suction area, it will be difficult to align the center of rotation and will likely cause eccentricity, increasing the risk that the centrifugal force of rotation will blow the substrate off.
If you have multiple substrates, please provide details of all substrates when requesting an estimate. We will consider whether designing and manufacturing a sample stage compatible with all substrates is possible. It is also possible to accept an order for new sample stages at a later date.
The appropriate sample stage depends on the conditions of the substrate to be spin-coated, such as thickness, size, shape (circular or rectangular) and material, and whether vacuum suction is required. Therefore, we make proposals for each customer. Sample stage materials are available in POM, PTFE, PCTFE, PEEK, and alumite-coated aluminum. Aluminum can also be Teflon coated.
If you have multiple substrates to be spin-coated by fixing them with vacuum suction, it is ideal to prepare one sample stage per substrate.
A substrate smaller than the vacuum suction area of the stage cannot be placed. The substrate cannot cover the holes and grooves for the vacuum suction, resulting in chemical solution leaking into the vacuum path and causing the equipment to fail.
Conversely, a larger substrate can be placed on the stage. However, if the substrate is too large compared to the vacuum suction area, it will be difficult to align the center of rotation and will likely cause eccentricity, increasing the risk that the centrifugal force of rotation will blow the substrate off.
If you have multiple substrates, please provide details of all substrates when requesting an estimate. We will consider whether designing and manufacturing a sample stage compatible with all substrates is possible. It is also possible to accept an order for new sample stages at a later date.
Centering Jig
The tool for manually centering a substrate on the stage
A centering jig assists in correctly placing a substrate in the center of the stage. By aligning the center of the substrate with the center of rotation, it prevents the substrate from becoming eccentric during rotation.
Since the spin coating is applied by rotation, any misalignment between the substrate and the center of rotation tends to affect the film formation process.
We recommend using a centering jig when spin-coating a large substrate that is difficult to align with the center of rotation or if you have a spin coater equipped with an edge rinse system. As the name implies, edge rinsing washes the edges of the substrate. So, if a substrate is off-center, the edge will not be washed properly.
Since the spin coating is applied by rotation, any misalignment between the substrate and the center of rotation tends to affect the film formation process.
We recommend using a centering jig when spin-coating a large substrate that is difficult to align with the center of rotation or if you have a spin coater equipped with an edge rinse system. As the name implies, edge rinsing washes the edges of the substrate. So, if a substrate is off-center, the edge will not be washed properly.
Vacuum Pump
Suction substrate with vacuum
A vacuum pump can suction a substrate onto the spin coater.
The amount of air required depends on the size of the substrate. The connection port is modified for easy connection to the spin coater. A three-meter-long transparent urethane vacuum hose with a diameter of 6 mm is included.
In addition, vacuum suction is not always required for spin-coating. If you are interested in other methods, please contact us.
The amount of air required depends on the size of the substrate. The connection port is modified for easy connection to the spin coater. A three-meter-long transparent urethane vacuum hose with a diameter of 6 mm is included.
In addition, vacuum suction is not always required for spin-coating. If you are interested in other methods, please contact us.
Electromagnetic Lock for Safety Cover
Lock safety cover during recipe
Since our spin coaters are equipped with a magnetic sensor interlock as a default, they will not start the recipe if the safety cover remains open and will automatically stop rotation when the cover is opened.
However, changing the magnetic sensor to this option enhances safety by locking the cover and keeping it closed during rotation.
Teflon-coated Cup
Enhance maintainability and chemical resistance
Teflon coating can be applied to the wetted parts of a stainless cup and inner cup to reduce the need for cup cleaning. This coating can also play a role in simplified acid resistance. In this case, the gas contacting part should also be Teflon coated.
We can also provide Teflon coating for the stainless outer cover.
We can also provide Teflon coating for the stainless outer cover.
Swing Arm and Dripping Unit
Upgrade spin coater with these options
The dripping unit assists in instilling the solution used for spin-coating or rinsing solution. Many customers request the addition of the automatic dripping system along with the automatic swing arm to upgrade the spin coater.
Multiple dripping units can be mounted. Based on the customer's request, we will design and manufacture an optimal spin coater with the most suitable instillation method.
The automatic swing arm with a step motor for the XY and Z axes allows high-precision positioning. Multiple arms and manual swing arms can also be mounted.
The dripping unit includes a micro-pressurized PP syringe type for laboratory use, a compact micro-syringe type for precise control and easy installation for both laboratory and production use, and a large-capacity pressurized tank type for production use. An electric micropipette can also be mounted. In addition, multiple dripping units can be mounted on a single swing arm.
A large capacity pressurized tank is suitable for the rinse function (edge rinse and back rinse), which is used for cleaning in the post-spin-coating process. Since the same rinse solution is often used, the pressurized tank can be used for both purposes to reduce costs.
Ultrasonic nozzles, dual-fluid nozzles, and high-pressure spray nozzles, emit N2 (nitrogen gas) blow nozzles or CDA (clean dry air) blow nozzles can be installed for cleaning and drying functions.
Multiple dripping units can be mounted. Based on the customer's request, we will design and manufacture an optimal spin coater with the most suitable instillation method.
The automatic swing arm with a step motor for the XY and Z axes allows high-precision positioning. Multiple arms and manual swing arms can also be mounted.
The dripping unit includes a micro-pressurized PP syringe type for laboratory use, a compact micro-syringe type for precise control and easy installation for both laboratory and production use, and a large-capacity pressurized tank type for production use. An electric micropipette can also be mounted. In addition, multiple dripping units can be mounted on a single swing arm.
A large capacity pressurized tank is suitable for the rinse function (edge rinse and back rinse), which is used for cleaning in the post-spin-coating process. Since the same rinse solution is often used, the pressurized tank can be used for both purposes to reduce costs.
Ultrasonic nozzles, dual-fluid nozzles, and high-pressure spray nozzles, emit N2 (nitrogen gas) blow nozzles or CDA (clean dry air) blow nozzles can be installed for cleaning and drying functions.
Higher Rotation
Upgrade spin coater with higher rotation
Please contact us if you need a higher-speed spin coater by combining a more powerful motor and pulley.
According to the motor manufacturer's guarantee, the speed of the ACT-300AIIH can be increased up to 12,000 rpm, and the ACT-220AIIH can be increased up to 14,000 rpm. However, it is actually possible to increase the speed to 14,000 rpm. If the spin-coated substrate is as small as φ20mm, we recommend the ACT-200SM-S, which can reach up to 60,000 rpm.
For models with larger cup sizes, the substrate weight should be considered to achieve a higher rotation speed.
Whether the higher speed can be achieved depends on the conditions of the substrate and other factors. Setting the maximum speed as indicated may be impossible for safety reasons. Please contact us for more details, and we will design and manufacture a spin coater with the appropriate speed.
According to the motor manufacturer's guarantee, the speed of the ACT-300AIIH can be increased up to 12,000 rpm, and the ACT-220AIIH can be increased up to 14,000 rpm. However, it is actually possible to increase the speed to 14,000 rpm. If the spin-coated substrate is as small as φ20mm, we recommend the ACT-200SM-S, which can reach up to 60,000 rpm.
For models with larger cup sizes, the substrate weight should be considered to achieve a higher rotation speed.
Whether the higher speed can be achieved depends on the conditions of the substrate and other factors. Setting the maximum speed as indicated may be impossible for safety reasons. Please contact us for more details, and we will design and manufacture a spin coater with the appropriate speed.
Other Customization
Customize standard model at an easy rate
We can combine the required units according to the customer's purposes and requirements.
We can provide not only spin coaters with automatic chemical dripping, dripping prevention, edge rinsing and back rinsing, compatibility with automatic transfer robots, high rotation, simple explosion protection, and electrical box separation, but also spin dryers, spin washers, and spin etching equipment in single wafer processing. We can also modify the exterior and materials of the cup and the safety cover of the standard models. Please refer to this site for details.
Like standard models, customized models are classified by cup size. However, the electrical components are completely different between the two models.
For example, the standard ACT-300AII and its customized ACT-300AIIS have the same 300mm cup diameter, but they are completely different units. The ACT-300AIIS cannot be produced by simply adding an automatic dripping unit to a standard model. Rather, extensive modifications may be required to customize a standard model.
We understand there may be a conflict with your budget, but if you are considering customization, please contact us first.
We can provide not only spin coaters with automatic chemical dripping, dripping prevention, edge rinsing and back rinsing, compatibility with automatic transfer robots, high rotation, simple explosion protection, and electrical box separation, but also spin dryers, spin washers, and spin etching equipment in single wafer processing. We can also modify the exterior and materials of the cup and the safety cover of the standard models. Please refer to this site for details.
Like standard models, customized models are classified by cup size. However, the electrical components are completely different between the two models.
For example, the standard ACT-300AII and its customized ACT-300AIIS have the same 300mm cup diameter, but they are completely different units. The ACT-300AIIS cannot be produced by simply adding an automatic dripping unit to a standard model. Rather, extensive modifications may be required to customize a standard model.
We understand there may be a conflict with your budget, but if you are considering customization, please contact us first.
List of Spin Coater Standard Machines (Tabletop Type)
