Cup Inner Diameter, Substrate Size and Sample Stage
The left figure shows the image of the substrate size and cup's inner diameter of a standard model.
The larger the inner diameter of the cup, the larger the substrate that can be accommodated. Our desktop model is classified according to the inner diameter. The larger the model number, the larger the substrate that can be spin-coated.
The substrate size indicated in the model specification does not refer to the maximum substrate size that can be physically spin-coated but rather the size within the guaranteed range for safety.
A sample stage shown in the figure is essential for spin coating. It is provided as an option depending on the characteristics and size of the substrate and the chemical solution to be applied. Since the shape and material are determined according to the application, the price of the sample stage varies on a case-by-case basis.
Also, although not shown in the figure, an optional vacuum pump is required. We will select the appropriate pump according to the required adsorption force.
The size of the substrate must be larger than the adsorption area of the sample stage to suction the substrate with the vacuum. If the size is too small, the substrate cannot be suctioned. Conversely, if it is too large, there is a risk that the substrate will be blown away during rotation due to the narrow vacuum suction area.
Having a separate sample stage for each substrate is recommended if you have multiple substrates. Please contact us with information on all substrates if one stage can accommodate multiple substrates. In addition, there is a method to fix a substrate to be suctioned without a vacuum.
The larger the inner diameter of the cup, the larger the substrate that can be accommodated. Our desktop model is classified according to the inner diameter. The larger the model number, the larger the substrate that can be spin-coated.
The substrate size indicated in the model specification does not refer to the maximum substrate size that can be physically spin-coated but rather the size within the guaranteed range for safety.
A sample stage shown in the figure is essential for spin coating. It is provided as an option depending on the characteristics and size of the substrate and the chemical solution to be applied. Since the shape and material are determined according to the application, the price of the sample stage varies on a case-by-case basis.
Also, although not shown in the figure, an optional vacuum pump is required. We will select the appropriate pump according to the required adsorption force.
The size of the substrate must be larger than the adsorption area of the sample stage to suction the substrate with the vacuum. If the size is too small, the substrate cannot be suctioned. Conversely, if it is too large, there is a risk that the substrate will be blown away during rotation due to the narrow vacuum suction area.
Having a separate sample stage for each substrate is recommended if you have multiple substrates. Please contact us with information on all substrates if one stage can accommodate multiple substrates. In addition, there is a method to fix a substrate to be suctioned without a vacuum.
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Below are data by material for the sample stage, an essential option for the spin coater.
These are general data and are not guaranteed values for the product.
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株式会社アクティブ 技術担当T
株式会社アクティブへ2014年入社。営業や総務を担当し、以降製品の技術担当としてスピンコーター製品の保守管理サポートを行う。
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